超精密加工技术，是20世纪60年代为了适应核能、大规模集成电路、激光和航天等尖端技术的需要而发展起来的精度极高的加工技术。超精密加工的精度比传统的精密加工提高了一个以上的数量级。到20世纪80年代，加工尺寸精度可达10纳米(1×10‒![]()
8米)，表面粗糙度达1纳米。超精密加工对工件材质、加工设备、工具、测量和环境等条件都有特殊的要求，需要综合应用精密机械、精密测量、精密伺服系统、计算机控制以及其他先进技术。工件材质必须极为细致均匀，并经适当处理以消除内部残余应力,保证高度的尺寸稳定性,防止加工后发生变形。加工设备要有极高的运动精度，导轨直线性和主轴回转精度要达到0.1微米级,微量进给和定位精度要达到0.01微米级。对环境条件要求严格，须保持恒温、恒湿和空气洁净，并采取有效的防振措施。加工系统的系统误差和随机误差都应控制在0.1微米级或更小。这些条件是靠综合应用精密机械、精密测量、精密伺服系统和计算机控制等各种先进技术获得的。
Frontiers of Mechanical Engineering主编郭东明院士和副主编蒋庄德院士，组织了“超精密加工”专题，已于近期出版。作者包括：郭东明院士（本刊主编）、章亮炽院士（澳大利亚）、黄涵（澳大利亚）、高航（大连理工）、康仁科（大连理工）、李圣怡（国防科技大学）、王西彬（北理工）、周天丰（北理工）、尹韶辉（湖南大学）、冯铭（日本）、陈林森（苏州大学）、张飞虎（哈工大）、袁巨龙（浙江工业大学）、艺苑（美国）、房丰洲（天津大学）等。敬请关注。
EDITORIAL
Special issue: Ultra-precision machining
Zhuangde JIANG, Dongming GUO
PROSPECT
Atomic and close-to-atomic scale manufacturing—A trend in manufacturing development
Fengzhou FANG
REVIEW ARTICLE
Precision glass molding: Toward an optimal fabrication of optical lenses
Liangchi ZHANG, Weidong LIU
Recent advances in micro- and nano-machining technologies
Shang GAO, Han HUANG
Recent advances in ultrasonic-assisted machining for the fabrication of micro/nano-textured surfaces
Shaolin XU, Tsunemoto KURIYAGAWA, Keita SHIMADA, Masayoshi MIZUTANI
Recent advancements in optical microstructure fabrication through glass molding process
Tianfeng ZHOU, Xiaohua LIU, Zhiqiang LIANG, Yang LIU, Jiaqing XIE, Xibin WANG
Review of small aspheric glass lens molding technologies
Shaohui YIN, Hongpeng JIA, Guanhua ZHANG, Fengjun CHEN, Kejun ZHU
Research progress on ultra-precision machining technologies for soft-brittle crystal materials
Hang GAO, Xu WANG, Dongming GUO, Yuchuan CHEN
Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials
Xiaoguang GUO, Qiang LI, Tao LIU, Renke KANG, Zhuji JIN, Dongming GUO
A review of the scalable nano-manufacturing technology for flexible devices
Wenbin HUANG, Xingtao YU, Yanhua LIU, Wen QIAO, Linsen CHEN
Mesoscale fabrication of a complex surface for integral impeller blades
Xibin WANG, Tianfeng ZHOU, Lijing XIE, Li JIAO, Zhibing LIU, Zhiqiang LIANG, Pei YAN
Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe error separation
Dede ZHAI, Shanyong CHEN, Ziqiang YIN, Shengyi LI
Review on the progress of ultra-precision machining technologies
Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG
RESEARCH ARTICLE
Ion beam figuring of continuous phase plates based on the frequency filtering process
Mingjin XU, Yifan DAI, Xuhui XIE, Lin ZHOU, Shengyi LI, Wenqiang PENG
Processing of high-precision ceramic balls with a spiral V-groove plate
Ming FENG, Yongbo WU, Julong YUAN, Zhao PING
Micro-optical fabrication by ultraprecision diamond machining and precision molding
Hui LI, Likai LI, Neil J. NAPLES, Jeffrey W. ROBLEE, Allen Y. YI
Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting of large-aperture KDP crystals
Feihu Zhang, Shengfei Wang, Chenhui An, Jian Wang, Qiao Xu
3D finite element prediction of chip flow, burr formation, and cutting forces in micro end-milling of aluminum 6061-T6
A. DAVOUDINEJAD, P. PARENTI, M. ANNONI
