1. Basic definitions, concepts and statistics of reliability engineering – 3.5hr
1.1 Definitions and terminology
● reliability and failure
● intrinsic, extrinsic, sudden, gradual failures
● bath tub curve
1.2 Reliability mathematics
● probability concepts
● reliability and failure functions
● common reliability distribution functions
1.3 Reliability testing principles
● temperature, voltage, humidity acceleration
● fatigue testing
● Screening
1.4 Analysis of failure data
● ranking of failure data
● censoring of failure data
● fitting of failure data
1.5 Effects of scaling on reliability
2. Gate oxide and Hot Carrier Degradation – 2.5h
2.1 Introduction
2.2 Basic oxide properties
● Oxide defects and charges
● Oxide conduction
● Oxide characterization techniques
● Oxide degradation
2.3 Hot Carrier Degradation (HCD)
● Hot carrier injection
● Effects of hot carrier injection
● Acceleration models and examples
● Dynamic degradation
● How to improve HCD
3. Time Dependent Dielectric Breakdown – 3h
● Basics
● TDDB testing: VBD, CVS, CCS, QBD
● Statistics
● Extrinsic breakdown
● Area scaling
● Percolation model and implications
● Acceleration model and reliability predictions
● Phases of breakdown: SILC, SBD, progressive BD
● TDDB in FinFET’s